TY  - BOOK
AU  - Thomas M Adams
AU  -  Rochard A Layton
TI  - Introductory MEMS
SN  - 978-81-322-0663-7
PY  - 2014///
PB  - Springer International Ed
KW  - MEMS&MOEMS
KW  - Electronics
N1  - TRANSFERED
ER  -