000 00509nam a2200205Ia 4500
005 20240913125659.0
008 240913s9999||||xx |||||||||||||| ||und||
020 _a978-81-8489-413-4
041 _aENGLISH
082 _A621.381 Q0
100 _aIvor Bride
245 4 _aThe Physics of Micro/Nano Fabrication
250 _a1st
260 _c2010
_bSpringer,New
500 _aREFERENCE
650 _aNano Fabrication
_bNano Technology
700 _a Julius J Muray
942 _cREF
999 _c246046
_d246046